JPH0184433U - - Google Patents
Info
- Publication number
- JPH0184433U JPH0184433U JP1987181598U JP18159887U JPH0184433U JP H0184433 U JPH0184433 U JP H0184433U JP 1987181598 U JP1987181598 U JP 1987181598U JP 18159887 U JP18159887 U JP 18159887U JP H0184433 U JPH0184433 U JP H0184433U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- transfer arm
- transfer
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987181598U JPH0184433U (en]) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987181598U JPH0184433U (en]) | 1987-11-26 | 1987-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0184433U true JPH0184433U (en]) | 1989-06-05 |
Family
ID=31473078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987181598U Pending JPH0184433U (en]) | 1987-11-26 | 1987-11-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0184433U (en]) |
-
1987
- 1987-11-26 JP JP1987181598U patent/JPH0184433U/ja active Pending
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